Manufacturing method, manufacturing program and manufacturing system for semiconductor device

ABSTRACT

The present of the invention provides a method of manufacturing a semiconductor device, including the steps of: acquiring information on a graphic composing a physical layout of a semiconductor integrated circuit; carrying out calculation for a transferred image in the physical layout; carrying out calculation for a signal delay based on the physical layout, and obtaining a wiring not meeting a specification having the signal delay previously set therein; and setting a portion into which a repeater is to be inserted based on at least one result of results obtained from the information on the graphic and calculation for the transferred image, respectively, with respect to the wiring not meeting the specification.

CROSS REFERENCES TO RELATED APPLICATIONS

The present invention contains subject matter related to Japanese PatentApplication JP 2008-013494 filed in the Japan Patent Office on Jan. 24,2008, the entire contents of which being incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device manufacturingmethod, a semiconductor device manufacturing program, and asemiconductor device manufacturing system each having a pattern designfor inserting a repeater for adjusting a signal delay into a wiring(s)of a semiconductor integrated circuit.

2. Description of the Related Art

In recent years, physical layouts of integrated circuits have beencomplicated along with miniaturization of semiconductor devices.Processing for generating mask data from the physical layout starts witha layout data on which is outputted after completion of arrangementwiring (a layout based on graphic data). That is to say, opticalproximity correction (OPC) processing is executed for a pattern afterdesign rule checking (DRC) processing and schematic inspecting (LVS)processing are carried out for a layout data on which is outputted aftercompletion of the arrangement wiring processing. Also, mask data isgenerated after completion of the OPC verifying processing.

On the other hand, so-called timing convergence processing, such as RCextracting processing, delay calculating processing, and static timinganalyzing (STA) processing, for calculating a parasitic capacitancevalue and a parasitic resistance value in a semiconductor integratedcircuit is executed in parallel with such layout processing.

Recently, a mutual influence between the layout processing side and thetiming convergence side has begun to be feared due to the complicationof the physical layout described above. For example, when the layoutafter completion of the detailed wiring is changed, it is necessary toensure the influence exerted on the timing. Also, in the processing forthe timing convergence, it is necessary to confirm whether or not thereis an influence exerted on the layout.

In order to cope with the former case of the above two cases, anarrangement wiring technique for removing a pattern exceeding alithography margin (lithography margin unachieved pattern) is developed.In addition thereto, a flow of layout processing is developed everydevice.

However, in order to cope with the latter case, since the designtechnique with which the timing convergence has been given a toppriority has been made until now, any of primary factors makingtrade-off with the timing does not exist.

Here, repeater inserting processing is known as one of the timingconvergence processing exerting an influence on a layout. The repeateris inserted into the middle of the wiring as may be necessary for thepurpose of adjusting a delay in the wiring. Thus, a wiring pattern isdivided into parts in a stage of a design, and an element such as abuffer is inserted between the parts obtained by dividing the wiringpattern, thereby adjusting a parasitic resistance and a parasiticcapacitance of the wiring. The repeater is inserted when delaycalculation after completion of RC extracting processing shows thatthere is a timing error. In this case, however, the layout changes aftercompletion of cutting of the wiring because the wiring in the repeaterinsertion position is cut. For this reason, it is necessary to confirmwhether or not the lithography unachieved pattern exists in the layoutafter completion of the processing.

Japanese Patent Laid-Open No. 2003-132111 proposes a technique aboutthis respect. This technique is described as follows. RC networksobtained in consideration of a dispersion of wiring widths and wiringintervals are enumerated, sizes of a buffer and a transistor are changedbased on a waveform of an input signal to a circuit, and finally one,having a minimum delay, of the RC networks thus obtained is selected tobe adopted as a wiring layout.

In addition, Japanese Patent Laid-Open No. Hei 11-40785 discloses atechnique with which a functional block exerting an influence on atiming is determined after a path exerting an influence after completionof delay calculation and timing verification is retrieved, and a bufferinsertion optimal portion is retrieved. Moreover, there is also proposeda technique for changing connection of a wiring receiving an influenceexerted thereon due to the buffer insertion.

SUMMARY OF THE INVENTION

However, with the above technique in the related art, it is notconfirmed whether or not the lithography margin unachieved patternexists in the result of the timing convergence processing. That is tosay, it is difficult to investigate the influence exerted on the timingin the phase of changing the layout, and the influence exerted on thelithography in the phase of inserting the repeater because no interfaceexists between the flow of the timing convergence and the flow of thelayout processing. For this reason, if the timing error should occurafter the generation of the mask data, it is necessary to return theprocessing back to the stage of the layout, which results in that a timerequired for the development enormously increases. In addition, when thewiring is cut in the phase of the repeater insertion, a graphic having ashort wiring length occurs, which causes the lithography error. This isa problem.

In the light of the foregoing, it is therefore desirable to provide asemiconductor device manufacturing method, a semiconductor devicemanufacturing program, and a semiconductor device manufacturing systemin each of which attention is paid to repeater insertion as processingfor timing convergence, and an influence exerted on a layout in a phaseof insertion of a repeater is taken into consideration.

In order to attain the desire described above, according to anembodiment of the present invention, there is provided a method ofmanufacturing a semiconductor device, including the steps of: acquiringinformation on a graphic composing a physical layout of a semiconductorintegrated circuit; carrying out calculation for a transferred image inthe physical layout; carrying out calculation for a signal delay basedon the physical layout, and obtaining a wiring not meeting aspecification having the signal delay previously set therein; andsetting a portion into which a repeater is to be inserted based on atleast one result of results obtained from the information on the graphicand calculation for the transferred image, respectively, with respect tothe wiring not meeting the specification.

In the embodiment of the present invention, when the repeater isinserted into the wiring not meeting the specification about the signaldelay, the repeater is inserted into the portion for which at least oneresult of the results obtained from the information on the graphic ofthe physical layout, and the calculation for the transferred image,respectively, is taken into consideration. As a result, it is possibleto carry out the repeater insertion for which the influence exerted onthe layout in the phase of the repeater insertion is taken intoconsideration.

According to another embodiment of the present invention, there isprovided a method of manufacturing a semiconductor device, including thesteps of: acquiring information on a graphic composing a physical layoutof a semiconductor integrated circuit; carrying out calculation for atransferred image and calculation for a stepped portion in the physicallayout; carrying out calculation for a signal delay based on thephysical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein; and setting a portioninto which a repeater is to be inserted based on at least one result ofresults obtained from the information on the graphic, and thecalculation for the stepped portion, respectively, with respect to thewiring not meeting the specification.

In the another embodiment of the present invention, when the repeater isinserted into the wiring not meeting the specification about the signaldelay, the repeater is inserted into the portion for which at least oneresult of the results obtained from the information on the graphic ofthe physical layout, and the calculation for the stepped portion,respectively, is taken into consideration. As a result, it is possibleto carry out the repeater insertion for which the influence exerted onthe layout in the phase of the repeater insertion is taken intoconsideration.

According to still another embodiment of the present invention, there isprovided a method of manufacturing a semiconductor device, including thesteps of: acquiring information on a graphic composing a physical layoutof a semiconductor integrated circuit; carrying out calculation for atransferred image in the physical layout; carrying out calculation for asignal delay based on the physical layout, and obtaining a wiring notmeeting a specification having the signal delay previously set therein;and sending the information on the wiring not meeting the specificationto a capacitance extracting system, and setting a portion into which arepeater is to be inserted based on the information on the wiring notmeeting the specification in the capacitance extracting system.

In the still another embodiment of the present invention, when theinformation on the wiring not meeting the specification having thesignal delay previously set therein is sent to the capacitanceextracting system, and the repeater is inserted into the portion thusset in the capacitance extracting system, the repeater is inserted intothe portion for which at least one result of the results obtained fromthe information on the graphic of the physical layout, and thecalculation for the transferred image, respectively, is taken intoconsideration. As a result, it is possible to carry out the repeaterinsertion for which the influence exerted on the layout in the phase ofthe repeater insertion is taken into consideration. Here, thecapacitance extracting system means a calculation system (for example,an RC extracting tool) for arithmetically operating a parasiticcapacitance from the physical layout of the semiconductor integratedcircuit.

According to yet another embodiment of the present invention, there isprovided a method of manufacturing a semiconductor device, including thesteps of: acquiring information on a graphic composing a physical layoutof a semiconductor integrated circuit; carrying out calculation for atransferred image and calculation for a stepped portion in the physicallayout; carrying out calculation for a signal delay based on thephysical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein; and sending theinformation on the wiring not meeting the specification to anarrangement wiring system, and setting a portion into which a repeateris to be inserted based on the information on the wiring not meeting thespecification in the arrangement wiring system.

In the yet another embodiment of the present invention, when theinformation on the wiring not meeting the specification having thesignal delay previously set therein is sent to the arrangement wiringsystem, and the repeater is inserted into the portion thus set in thecapacitance extracting system, the repeater is inserted into the portionfor which at least one result of the results obtained from theinformation on the graphic of the physical layout, and the calculationfor the transferred image, respectively, is taken into consideration. Asa result, it is possible to carry out the repeater insertion for whichthe influence exerted on the layout in the phase of the repeaterinsertion is taken into consideration. Here, the arrangement wiringsystem means a calculation system (for example, an arrangement wiringtool) for generating graphic information on a physical layout from asemiconductor integrated circuit.

According to a further embodiment of the present invention, there isprovided a program for manufacturing a semiconductor device, the programbeing adapted to instruct a computer to execute the steps of: acquiringinformation on a graphic composing a physical layout of a semiconductorintegrated circuit; carrying out calculation for a transferred image inthe physical layout; carrying out calculation for a signal delay basedon the physical layout, and obtaining a wiring not meeting aspecification having the signal delay previously set therein; andsetting a portion into which a repeater is to be inserted based on atleast one result of results obtained from the information on the graphicand calculation for the transferred image, respectively, with respect tothe wiring not meeting the specification.

In the further embodiment of the present invention, when the repeater isinserted into the wiring not meeting the specification about the signaldelay, the repeater is inserted into the portion for which at least oneresult of the results obtained from the information on the graphic ofthe physical layout, and the calculation for the transferred image,respectively, is taken into consideration. As a result, it is possibleto provide the program which is capable of carrying out the repeaterinsertion for which the influence exerted on the layout in the phase ofthe repeater insertion is taken into consideration.

According to a still further embodiment of the present invention, thereis provided a program for manufacturing a semiconductor device, theprogram being adapted to instruct a computer to execute the steps of:acquiring information on a graphic composing a physical layout of asemiconductor integrated circuit; carrying out calculation for atransferred image in the physical layout; carrying out calculation for astepped portion in the physical layout; carrying out calculation for asignal delay based on the physical layout, and obtaining a wiring notmeeting a specification having the signal delay previously set therein;and setting a portion into which a repeater is to be inserted based onat least one result of results obtained from the information on thegraphic, the calculation for the transferred image, and the calculationfor the stepped portion, respectively.

In the still further embodiment of the present invention, when therepeater is inserted into the wiring not meeting the specification aboutthe signal delay, the repeater is inserted into the portion for which atleast one result of the results obtained from the information on thegraphic of the physical layout, and the calculation for the steppedportion, respectively, is taken into consideration. As a result, it ispossible to provide the program which is capable of carrying out therepeater insertion for which the influence exerted on the layout in thephase of the repeater insertion is taken into consideration.

According to a yet further embodiment of the present invention, there isprovided a program for manufacturing a semiconductor device, the programbeing adapted to instruct a computer to execute the steps of: acquiringinformation on a graphic composing a physical layout of a semiconductorintegrated circuit; carrying out calculation for a transferred image inthe physical layout; carrying out calculation for a signal delay basedon the physical layout, and obtaining a wiring not meeting aspecification having the signal delay previously set therein; andsending the information on the wiring not meeting the specification to acapacitance extracting system, and setting a portion into which arepeater is to be inserted based on at least one result of resultsobtained from the information on the graphic, and the calculation forthe transferred image, respectively.

In the yet further embodiment of the present invention, when theinformation on the wiring not meeting the specification having thesignal delay previously set therein is sent to the capacitanceextracting system, and the repeater is inserted into the portion notmeeting the specification in the capacitance extracting system, therepeater is inserted into the portion for which at least one result ofthe results obtained from the information on the graphic of the physicallayout, and the calculation for the transferred image, respectively, istaken into consideration. As a result, it is possible to provide theprogram which is capable of carrying out the repeater insertion forwhich the influence exerted on the layout in the phase of the repeaterinsertion is taken into consideration. Here, the capacitance extractingsystem means the calculation system (for example, the RC extractingtool) for arithmetically operating the parasitic capacitance from thephysical layout of the semiconductor integrated circuit.

According to an even further embodiment of the present invention, thereis provided a program for manufacturing a semiconductor device, theprogram being adapted to instruct a computer to execute the steps of:acquiring information on a graphic composing a physical layout of asemiconductor integrated circuit; carrying out at least one ofcalculation for a transferred image in the physical layout, andcalculation for a stepped portion in the physical layout; carrying outcalculation for a signal delay based on the physical layout, andobtaining a wiring not meeting a specification having the signal delaypreviously set therein; and sending the information on the wiring notmeeting the specification to an arrangement wiring system, and setting aportion into which a repeater is to be inserted based on at least oneresult of results obtained from the information on the graphic, thecalculation for the transferred image, and the calculation for thestepped portion, respectively, with respect to the wiring not meetingthe specification in the arrangement wiring system.

In the even further embodiment of the present invention, when theinformation on the wiring not meeting the specification having thesignal delay previously set therein is sent to the arrangement wiringsystem, and the repeater is inserted into the capacitance extractingsystem, the repeater is inserted into the portion for which at least oneresult of the results obtained from the information on the graphic ofthe physical layout, and the calculation for the transferred image,respectively, is taken into consideration. As a result, it is possibleto provide the program which is capable of carrying out the repeaterinsertion for which the influence exerted on the layout in the phase ofthe repeater insertion is taken into consideration. Here, thearrangement wiring system means the calculation system (for example, thearrangement wiring tool) for generating graphic information on aphysical layout from a semiconductor integrated circuit.

According to an even further embodiment of the present invention, thereis provided a system for manufacturing a semiconductor device, thesystem including a computer adapted to execute the steps of: acquiringinformation on a graphic composing a physical layout of a semiconductorintegrated circuit; carrying out at least one of calculation for atransferred image, and calculation for a stepped portion in the physicallayout; carrying out calculation for a signal delay based on thephysical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein; and setting a portioninto which a repeater is to be inserted based on at least one result ofresults obtained from the information on the graphic, and thecalculation for the transferred image, respectively, with respect to thewiring not meeting the specification.

In the even further embodiment of the present invention, when therepeater is inserted into the wiring not meeting the specification aboutthe signal delay, the repeater is inserted into the portion for which atleast one result of the results obtained from the information on thegraphic of the physical layout, and the calculation for the transferredimage, respectively, is taken into consideration. As a result, it ispossible to provide the manufacturing system which is capable ofcarrying out the repeater insertion for which the influence exerted onthe layout in the phase of the repeater insertion is taken intoconsideration.

According to an even further embodiment of the present invention, thereis provided a system for manufacturing a semiconductor device, thesystem including a computer adapted to execute the steps of: acquiringinformation on a graphic composing a physical layout of a semiconductorintegrated circuit; carrying out calculation for a transferred image inthe physical layout; carrying out calculation for a stepped portion inthe physical layout; carrying out calculation for a signal delay basedon the physical layout, and obtaining a wiring not meeting aspecification having the signal delay previously set therein; andsetting a portion into which a repeater is to be inserted based on atleast one result of results obtained from the information on thegraphic, the calculation for the transferred image, and the calculationfor the stepped portion, respectively.

In the even further embodiment of the present invention, when therepeater is inserted into the wiring not meeting the specification aboutthe signal delay, the repeater is inserted into the portion for which atleast one result of the results obtained from the information on thegraphic composing the physical layout, the calculation for thetransferred image, and the calculation for the transferred image istaken into consideration. As a result, it is possible to provide themanufacturing system which is capable of carrying out the repeaterinsertion for which the influence exerted on the layout in the phase ofthe repeater insertion is taken into consideration.

In addition, according to an even further embodiment of the presentinvention, there is provided a system for manufacturing a semiconductordevice, the system including a computer adapted to execute the steps of:acquiring information on a graphic composing a physical layout of asemiconductor integrated circuit; carrying out at least one ofcalculation for a transferred image in the physical layout, andcalculation for a stepped portion in the physical layout; carrying outcalculation for a signal delay based on the physical layout, andobtaining a wiring not meeting a specification having the signal delaypreviously set therein; and sending information on the wiring notmeeting the specification to a capacitance extracting system, andsetting a portion in which a repeater is to be inserted based on atleast one result of results obtained from the information on thegraphic, and the calculation for the transferred image, respectively,with respect to the wiring not meeting the specification in thecapacitance extracting system.

In the even further embodiment of the present invention, when theinformation on the wiring not meeting the specification having thesignal delay previously set therein is sent to the capacitanceextracting system, and the repeater is inserted into the portion thusobtained in the capacitance extracting system, the repeater is insertedinto the portion for which at least one result of the results obtainedfrom the information on the graphic composing the physical layout, andthe calculation for the transferred image, respectively, is taken intoconsideration. As a result, it is possible to provide the manufacturingsystem which is capable of carrying out the repeater insertion for whichthe influence exerted on the layout in the phase of the repeaterinsertion is taken into consideration. Here, the capacitance extractingsystem means the calculation system (for example, the RC extractingtool) for arithmetically operating the parasitic capacitance from thephysical layout of the semiconductor integrated circuit.

Also, according to an even further embodiment of the present invention,there is provided a system for manufacturing a semiconductor device, thesystem including a computer adapted to execute the steps of: acquiringinformation on a graphic composing a physical layout of a semiconductorintegrated circuit; carrying out calculation for a transferred image inthe physical layout, and calculation for a stepped portion in thephysical layout; carrying out calculation for a signal delay based onthe physical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein; and sending theinformation on the wiring not meeting the specification to anarrangement wiring system, and setting a portion into which a repeateris to be inserted based on at least one result of results obtained fromthe information on the graphic, the calculation for the transferredimage, and the calculation for the stepped portion, respectively, withrespect to the wiring not meeting the specification in the arrangementwiring system.

In the even further embodiment of the present invention, when theinformation on the wiring not meeting the specification having thesignal delay previously set therein is sent to the arrangement wiringsystem, and the repeater is inserted into the capacitance extractingsystem, the repeater is inserted into the portion for which at least oneresult of the results obtained from the information on the graphic ofthe physical layout, and the calculation for the transferred image,respectively, is taken into consideration. As a result, it is possibleto provide the manufacturing system which is capable of carrying out therepeater insertion for which the influence exerted on the layout in thephase of the repeater insertion is taken into consideration. Here, thearrangement wiring system means the calculation system (for example, thearrangement wiring tool) for generating graphic information on aphysical layout from a semiconductor integrated circuit.

According to the present invention, the repeater can be adequatelyinserted into the lithography margin unachieved pattern of the wiringnot meeting the specification having the signal delay previously set.Also, it is possible to prevent the backing of the design flow. As aresult, it is possible to increase the efficiency of the entire designflow.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a flow chart explaining a method of manufacturing asemiconductor device according to a first embodiment of the presentinvention;

FIGS. 2A, 2B and 2C are respectively graphical representationsexplaining results of shape checking processing;

FIG. 3 is a schematic view explaining a portion into which a repeater isto be inserted in the first embodiment of the present invention;

FIG. 4 is a flow chart explaining a method of manufacturing asemiconductor device according to a second embodiment of the presentinvention;

FIG. 5 is a flow chart explaining a method of manufacturing asemiconductor device according to a third embodiment of the presentinvention;

FIG. 6 is a schematic view explaining overlapping among variousconditions;

FIG. 7 is a flow chart explaining a method of manufacturing asemiconductor device in the related art; and

FIG. 8 is a schematic view showing portions into each of which arepeater is to be inserted by utilizing the method of manufacturing asemiconductor device in the related art.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The preferred embodiments of the present invention will be described indetail hereinafter with reference to the accompanying drawings.

Outline of Processing

The feature of the present invention is that when a repeater composed ofan element such as a buffer is inserted into a predetermined wiring forthe purpose of adjusting a signal delay in a circuit in design supportfor a semiconductor integrated circuit as an object of manufacture, therepeater is inserted in consideration of an influence of lithography.

A method of manufacturing a semiconductor device according to any ofembodiments of the present invention principally includes the followingsteps as will be described below.

(a) A step acquiring information on a graphic composing a physicallayout of a semiconductor integrated circuit.

(b) A step of carrying out calculation for a transferred image, andcalculation for a stepped portion in the physical layout.

(c) A step of carrying out calculation for a signal delay based on thephysical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein.

(d) A step of setting a portion into which a repeater is to be insertedbased on at least one result of results obtained from the information onthe graphic, the calculation for the transferred image, and thecalculation for the stepped portion, respectively, with respect to thewiring not meeting the specification having the signal delay previouslyset therein.

More specifically, firstly, an arrangement wiring tool (referred to “anarrangement wiring system” as well) generates graphic data (data havinga GDS format) composing a physical layout from the physical layoutobtained after completion of a detailed wiring of a semiconductorintegrated circuit as an object of the manufacture. Also, thearrangement wiring tool inputs the resulting graphic data to a shapechecking system.

Next, the shape checking system carries out a transfer simulation and astepped portion simulation for the layout, thereby generating acoordinate value list of a portion in which a wiring width and a wiringlength do not meet a predetermined photolithography condition, that is,a specification unachieved portion (lithography margin unachievedpattern). In addition, an RC extracting tool (referred to as “an RCextracting system” as well) extracts a parasitic capacitance value and aparasitic resistance value of a circuit, and calculates a signal delayin the circuit, thereby obtaining a wiring not meeting thespecification. Here, the parasitic resistance value R of the circuit iscalculated from a wiring cross sectional area A obtained from a wiringthickness and a wiring width, a wiring length L, and an electricalresistivity p. For this reason, the parasitic resistance value R of thecircuit is obtained from calculation of R=ρ×L/A by using the result ofthe transfer simulation, and the result of the stepped portionsimulation. The parasitic resistance value R of the circuit may be usedas the specification. In this case, wirings each having the parasiticresistance value R, obtained from the above calculation, which does notmeet a predetermined value are obtained.

Next, a buffer is selectively inserted into a portion of the wiring, ofthe wirings each not meeting the above specification, having thecoordinate value on the physical layout as the lithography marginunachieved pattern in the region of not violating a restriction of afloor plan about the arrangement wiring and the like. Also, the checkfor signal delay calculation (timing check) is carried out again. Afterthat, when there is no problem in timing check, the data on the physicallayout is outputted to a subsequent stage (for example, a mask dataprocessing system). With such a method, the shape check is carried outfor the physical layout after completion of the detailed wiring, whichresults in that it is possible to adequately extract a repeaterinsertion recommended position.

First Embodiment

Next, a description will be given with respect to a method ofmanufacturing a semiconductor device according to a first embodiment ofthe present invention. It is noted that a flow of a method ofmanufacturing a semiconductor device in the related art will now bedescribed in brief for comparison with the first embodiment prior to thedescription of the first embodiment.

FIG. 7 is a flow chart explaining a method of manufacturing asemiconductor device in the related art. That is to say, with themanufacturing method in the related art, graphic data (data having a GDSformat) on a physical layout which is generated by executing processingfor a schematic wiring (Step S401) and processing for a detailed wiring(Step S402) by using an arrangement wiring tool is sent to a section forexecuting mask data processing.

On the other hand, RC extracting processing (Step S403), and delaycalculation processing (Step S404) are executed as timing convergenceprocessing. When there is an error (timing error) not meeting aspecification previously set based on the delay calculation processing,a repeater is inserted as one of methods coping with the error (StepS406). After completion of the insertion of the repeater, the delaycalculation processing is executed again. Then, when the signal delaymeets the specification previously set, static timing analyzingprocessing is executed (Step S405).

FIG. 8 is a schematic view showing portions into each of which arepeater is to be inserted by utilizing the method of manufacturing asemiconductor device in the related art. The repeater is inserted intopositions, each indicated by an arrow, in wiring patterns P shown inFIG. 8. Although the repeater insertion positions are portions eachhaving a long wiring length, in FIG. 8, the positions into each of whichthe repeater is inserted are selected for the portions each having along wiring length without taking a layout in the vicinities thereofinto consideration. Therefore, after completion of the insertion of therepeater, a graphic having a short wiring length is generated and thusthe lithography margin unachieved pattern is newly generated in somecases. In addition, in spite of presence of a long wiring P′ having thelithography margin unachieved pattern, no repeater is inserted into thelong wiring P′.

With the manufacturing method in the related art, since the mask dataprocessing and the timing convergence processing are executedindependently of each other, it is not taken into consideration that theabove graphic having the short wiring length is generated. Therefore, nolithography margin check is carried out after completion of theinsertion of the repeater as shown in FIG. 7. However, if thelithography margin check is carried out, as indicated by a broken linein FIG. 7, presence or absence of the lithography margin unachievedpattern is confirmed next to the static timing analyzing processing(Step S405). In the case of presence of the lithography marginunachieved pattern, it is necessary that the operation returns back tothe processing in the arrangement wiring tool, and the layout is thencorrected. In this case, a processing time increases due to the backingin operation.

Next, a description will be given with respect to a method ofmanufacturing a semiconductor device according to the first embodimentof the present invention. FIG. 1 is a flow chart explaining the methodof manufacturing a semiconductor device according to the firstembodiment of the present invention. The first embodiment of the presentinvention is different from the related art previously stated in thatshape checking processing, optical proximity correcting (OPC)processing, and OPC verifying processing are executed with respect tographic data on a physical layout generated by an arrangement wiringtool.

Describing step by step, firstly, graphic data (data having a GDSformat) on a physical layout which is generated by executing processingfor a schematic wiring (Step S101) and processing for a detailed wiring(Step S102) by using an arrangement wiring tool is sent to a section forexecuting mask data processing.

On the other hand, RC extracting processing (Step S105) is executed astiming convergence processing by an RC extracting tool. In addition,there are executed processing for sending information on connection in acircuit to the RC extracting tool (Step S103), shape checking processingbased on graphic data on a physical layout generated in the arrangementwiring tool, the OPC processing, and OPC verifying processing (StepS104).

In the shape checking processing, information on a portion having a longwiring length equal to or longer than a preset length is extracted fromthe graphic data on the physical layout. The information on the portionthus extracted is held as the coordinates on the physical layout. Inaddition, the OPC processing and the OPC verifying processing areexecuted, thereby extracting a lithography margin unachieved pattern.

The results of execution of the shape checking processing and the OPCverifying processing (a position of the lithography margin unachievedpattern) is inputted to the RC extracting tool. The information inputtedto the RC extracting tool (the information on the connection in thecircuit, and the results of execution of the shape checking processingand the OPC verifying processing) is used when a timing error occurs indelay calculation after completion of the RC extracting processing. Thatis to say, a delay calculation tool calculates a signal delay in thecircuit (Step S106). When the timing error not meeting a specificationpreviously set occurs, a repeater is inserted as one of methods copingwith the timing error (Step S107).

In the first embodiment, the repeater insertion position is set as aninsertion position (the position of the lithography margin unachievedpattern) for which the layout is taken into consideration by using theinformation on the shape check and the information on the lithographymargin check which are inputted to the RC extracting tool, and theinformation on the connection in the circuit.

The signal delay in the wiring in the circuit increases in proportion toa square of a wiring length. Therefore, when there is the timing error,the repeater composed of an element such as a buffer is inserted intothe middle of the wiring to cut the wiring, thereby adjusting the delay.In such a manner, the timing error can be improved. In this case, therepeater insertion position is set as a position having a long wiringlength and the lithography margin unachieved pattern, thereby making itpossible to remove the lithography margin unachieved patternconcurrently with an improvement in the timing error. That is to say,the repeater can be selectively inserted into the position which isadvantageous for both these factors.

Here, a repeater insertion process (Step S107) in the first embodimentwill be described in detail. Firstly, the results of execution of theshape checking processing and lithography margin checking processingdescribed above are inputted to the RC extracting tool. The RCextracting tool serves to extract a parasitic capacitance value and aparasitic resistance value in a semiconductor integrated circuit as anobject of the manufacture in a preceding stage of the delay calculation.In this case, this function is utilized in this embodiment because theinformation on the physical layout of the circuit is treated in the RCextracting tool.

That is to say, the RC extracting tool is provided with a function ofinputting or outputting the information on the physical layout inexecuting the RC extracting processing. Therefore, it is possible toadditionally input the information on the result of execution of theshape checking processing for the physical layout, and the informationon the results of execution of the lithography margin checkingprocessing such as the OPC processing and the OPC verifying processing.In the shape checking processing described above, there are checkeddistributions of the wiring widths and the wiring lengths based on theGDS data (the graphic data on the physical layout) outputted aftercompletion of the execution of the arrangement wiring processing.

The shape checking processing means a method of checking line widths,line lengths and the like in the graphic composing the layout by, forexample, utilizing a design rule checking system. FIGS. 2A and 2B showhistograms about the results of execution of the shape checkingprocessing. In FIG. 2A, an axis of abscissa represents a wiring length,and an axis or ordinate represents a frequency of each wiring length. Inaddition, in FIG. 2B, an axis of abscissa represents a wiring delay whenthe wiring lengths shown in FIG. 2A are assumed, and an axis of ordinaterepresents a frequency of each wiring delay. Also, each value of thewiring delays lying on the right-hand side of a tolerance is a valueexceeding a threshold of the wiring delay. A range obtained when thewiring delays in the range shown in FIG. 2B are converted into thewiring lengths is indicated by a circle of FIG. 2A. In addition, theconversion between the wiring lengths of FIG. 2A and the wiring delaysof FIG. 2B are carried out by using a graph shown in FIG. 2C. In FIG.2C, an axis of abscissa represents the wiring length, and an axis ofordinate represents a gradient of a delay function when the delaycalculation is carried out with a model circuit, a capacitance value,and a resistance value being specified.

That is to say, the graph of FIG. 2C shows that as the wiring lengthbecomes long in the model circuit used in this embodiment, the gradientof the delay function becomes small, that is, the operation speedbecomes slow. Therefore, it is necessary to cut any of the wiringshaving the respective wiring lengths with each of which the wiring delayis equal to or longer than a predetermined value (a portion of thewiring lengths indicated by slant lines in the circle of FIG. 2A). Inother words, when the wiring lengths indicated by the slant lines in thecircle of FIG. 2A exist in the layout, the repeater will be insertedinto each of portions having these wiring lengths.

Note that, in the example shown in FIGS. 2A to 2C, the tolerance is setfrom a viewpoint of determining whether or not the wiring lengths meet aspecification determined based on a restriction to the delaycalculation, the capacitance value and the resistance value in thecircuit. However, it is better to use a tolerance about at least one ofthe wiring width, and the thicknesses of a metal and an interlayerinsulating film composing elements of the semiconductor integratedcircuit in addition to the wiring length.

Moreover, in the first embodiment, the OPC processing and the OPCverifying processing are executed for the physical layout, therebyobtaining the information on the lithography margin unachieved pattern.Also, the repeater insertion portions are determined by using theinformation on the resulting lithography margin unachieved pattern.

As an example, an exposure wavelength of 193 nm, NA of 0.75, σ of 0.85,and an orbicular zone of ⅔ are set as optical conditions for a transfersimulation for the OPC processing and the lithography margin checkingprocessing. Also, an exposure amount is changed 0.5 mJ by 0.5 mJ with13.5 mJ as a center, and a defocus amount having a range of +0.2 μm iscalculated 0.05 μm by 0.05 μm. It is noted that for a set value in adose focus condition, a line and space of 100 nm is used as a target. Inaddition, the OPC processing may be executed or may not be executed aslong as the lithography margin unachieved pattern can be extracted.

Here, a large number of lithography margin unachieved patterns, forexample, as shown in FIG. 3, exist in lines near a line P1 having athick wiring width. When lines each having a width of 100 nm exist inthe vicinity of a line having a width of 150 nm or more, the line widthof 100 nm of the lines is narrowed so that the lines each having theline width of 100 nm becomes the lithography margin unachieved patterns,respectively. When the lines each having the line width of 100 nm areshortened (the wirings are cut) in the portions in which the lines eachhaving the line width of 100 nm are narrowed, it is possible to reducethe number of lithography margin unachieved patterns.

The data on the positions (coordinates) of such lithography marginunachieved patterns is inputted to the RC extracting tool, and theinformation on the connection in the circuit is then referred. In thiscase, when it is necessary to insert the repeater into desired one(s) ofthe lithography margin unachieved patterns, the repeater can beselectively inserted into the lithography margin unachieved patterns.

The positions of the lithography margin unachieved patterns can beobtained from the information on the connection in the circuit, and theresult of calculation for the stepped portion simulation as well as fromthe result of calculation for a transferred image. In addition, thepositions of the lithography margin unachieved patterns may also beobtained from plural information, i.e., the result of calculation forthe transferred image, the information on the connection in the circuit,and the result of calculation for the stepped portion simulation. In thecase where the positions of the lithography margin unachieved patternare specified from the information on the connection in the circuit, itis estimated that each of the positions thereof is slightly shifted ascompared with the case where the positions of the lithography marginunachieved pattern are specified from the result of calculation for thetransferred image. However, a precision of a level of 1 mm is notnecessarily required from a viewpoint of the purpose of cutting thewire.

The repeater insertion position selected in the first embodiment isindicated by an arrow in FIG. 3. The wiring line indicated by the arrowis a long wiring P′ existing in the vicinity of the thick wiring lineP1. When viewing the transferred image (indicated by a heavy solid linein FIG. 3), it is understood that the wiring width is narrow in thevicinity including a position indicated by the arrow is narrow. Fromthis fact, it is advantageous from a viewpoint of the lithography marginto insert the repeater into this position.

In the first embodiment, the physical layout in which the repeater isinserted into that position in such a manner is verified again, and itis then confirmed that there is no new problem (Step S108). Also, delaycalculating processing (Step S106), and static timing analyzingprocessing (Step S109) are executed.

As just described above, in the first embodiment, after completion ofthe insertion of the repeater, the lithography margin checkingprocessing, and the timing verifying processing are executed again.Here, the layout verifying processing (Step S108) can be omitted ifbeing unnecessary. The case where it is unnecessary to execute thelayout verifying processing is the case where it is possible to clearlydetermine that no lithography margin unachieved pattern newly occursbecause of a slight change in layout.

It is noted that in the first embodiment, the conditions for the OPCprocessing and OPC verifying processing described above can beindividually set depending on the semiconductor integrated circuit as anobject of the manufacture. In addition, the shape checking processingmay also depend on the analysis about the layout and the wafer image,the film thickness distribution or the like in addition to utilizationof the design rule checking system. In addition, an example, of thelayout of the repeater insertion, used in the first embodiment is merelyan example of a technical drawing of a circuit.

Moreover, although in the first embodiment, the repeater is selectivelyinserted into the portion having the long wiring length and thelithography margin unachieved pattern, the present invention is by nomeans limited to this condition. For example, as shown in FIG. 6, theinsertion condition may also be set depending on the purpose so that therepeater is selectively inserted into a portion meeting the condition inwhich at least two conditions of the three conditions of the lithographymargin unachieved pattern, the portion having the long wiring length,and the critical path overlap each other.

In addition, in the first embodiment, the example in which the portionhaving the long wiring length equal to or longer than the predeterminedlength is extracted from the graphic data on the physical layout of thesemiconductor integrated circuit has been described as the shapechecking processing. However, processing in which stepped portions ofthe wirings are detected from the cross sectional structure of thephysical layout, the stepped portion of the wiring having the size equalto or larger than a preset value is extracted from these steppedportions of the wirings, and the stepped portion of the wiring thusextracted is made a candidate of the repeater insertion portion may alsobe adopted as shape checking processing other than the shape checkingprocessing described above.

Second Embodiment

Next, a description will be given with respect to a method ofmanufacturing a semiconductor device according to a second embodiment ofthe present invention. The feature of the second embodiment of thepresent invention is that sections for executing the shape checkingprocessing, the OPC processing, and the OPC verifying processing,respectively, in the first embodiment previously described are built inthe RC extracting tool (RC extracting system).

FIG. 4 is a flow chart explaining the method of manufacturing thesemiconductor device according to the second embodiment of the presentinvention. Firstly, graphic data (data having the GDS format) on aphysical layout generated by executing schematic wiring processing (StepS201) and detailed wiring processing (Step S202) by using thearrangement wiring tool is sent to the section for executing mask dataprocessing.

On the other hand, the graphic data on the physical layout thusgenerated is sent to the RC extracting tool. Also, the RC extractingtool executes the shape checking processing, the OPC processing, the OPCverifying processing, and the RC extracting processing (Step S203). Thatis to say, the RC extracting tool extracts data on a portion having along wiring length equal to or longer than a preset length from thegraphic data on the physical layout after completion of the detailedwiring processing. In addition, the RC extracting tool executes the OPCprocessing and the OPC verifying processing based on the graphic data onthe physical layout, thereby extracting the lithography marginunachieved patterns. The conditions for the OPC processing and the OPCverifying processing, and the contents of the lithography margin checkmay be identical to those in the first embodiment previously described.

In the shape checking processing, information on a portion having a longwiring length equal to or longer than a preset length is extracted fromthe graphic data on the physical layout. The information on the portionthus extracted is held as the coordinates on the physical layout.

In addition, in the processing for verifying the lithography marginunachieved patterns, the OPC processing and the OPC verifying processingare executed, thereby extracting information on portions in each ofwhich a predetermined lithography margin is not achieved. It is notedthat the positions of the lithography margin unachieved patterns can beobtained from the information on the connection in the circuit, and theresult of calculation for the stepped portion simulation as well as fromthe result of calculation for the transferred image. In addition, thepositions of the lithography margin unachieved patterns may also beobtained from plural information, i.e., the result of calculation forthe transferred image, the information on the connection in the circuit,and the result of calculation for the stepped portion simulation.

After that, the result of execution of the shape checking processing,and the result of execution of the lithography margin unachieved patternverifying processing are both held. Also, the delay calculation toolcalculates a signal delay in the circuit (Step S204).

As a result, when it is determined that it is necessary to carry out therepeater insertion because a timing error occurs, a repeater insertionportion is extracted based on the information on the result of executionof the shape checking processing, and the information on the result ofexecution of the lithography margin unachieved pattern verifyingprocessing which are previously held in combination with the circuitconnection information, and the repeater is inserted into the repeaterinsertion portion thus extracted (Step S205).

The portion into which the repeater is to be inserted is a positionindicated by an arrow in FIG. 3 similarly to the case of the firstembodiment. In addition, processing for carrying out layout verificationfor the physical layout after completion of the repeater insertion (StepS206), and it is confirmed that no lithography margin unachieved portionnewly occurs. Also, static timing analyzing processing is executed (StepS207). Here, the layout verifying processing (Step S206) can be omittedif being—unnecessary. The case where it is unnecessary to execute thelayout verifying processing is the case where it is possible to clearlydetermine that no lithography margin unachieved pattern newly occursbecause of a slight change in layout.

In the second embodiment, the processing efficiency can be enhanced ascompared with the case of the first embodiment because the input of theinformation on the result of execution of the shape checking processing,and the information on the connection in the circuit to the RC toolbecomes unnecessary although being necessary in the first embodiment.That is to say, the lithography verifying processing is executed in theRC extracting tool, thereby omitting an extra time required forinput/output of the data. As a result, it is possible to shorten theprocessing time.

It is noted that in the first embodiment, the conditions for the OPCprocessing and OPC verifying processing described above can beindividually set depending on the semiconductor integrated circuit as anobject of the manufacture. In addition, the shape checking processingmay also depend on the analysis about the layout and the wafer image,the film thickness distribution or the like in addition to utilizationof the design rule checking system. In addition, an example, of thelayout of the repeater insertion, used in the second embodiment ismerely an example of a technical drawing of a circuit.

Moreover, although in the second embodiment, the repeater is selectivelyinserted into the portion having the long wiring length and thelithography margin unachieved pattern, the present invention is by nomeans limited to this condition. For example, as shown in FIG. 6, theinsertion condition may also be set depending on the purpose so that therepeater is selectively inserted into a portion meeting the condition inwhich at least two conditions of the three conditions of the lithographymargin unachieved pattern, the portion having the long wiring length,and the critical path overlap each other.

In addition, in the second embodiment, the example in which the portionhaving the long wiring length equal to or longer than the preset lengthis extracted from the graphic data on the physical layout of thesemiconductor integrated circuit has been described as the shapechecking processing. However, the processing in which stepped portionsof the wirings are detected from the cross sectional structure of thephysical layout, the stepped portion of the wiring having the size equalto or larger than a preset value is extracted from these steppedportions of the wirings, and the stepped portion of the wiring thusextracted is made a candidate of the repeater insertion portion may alsobe adopted as shape checking processing other than the shape checkingprocessing described above.

Third Embodiment

Next, a description will be given with respect to a method ofmanufacturing a semiconductor device according to a third embodiment ofthe present invention. The feature of the third embodiment is that thetiming error checking processing based on the shape checking processing,the OPC processing, the OPC verifying processing, and the delaycalculating processing in the first embodiment previously described isexecuted in the arrangement wiring tool (arrangement wiring system).

FIG. 5 is a flow chart explaining the method of manufacturing asemiconductor device according to the third embodiment of the presentinvention. Firstly, graphic data (data having the GDS format) on aphysical layout generated by executing schematic wiring processing(S301) and detailed wiring processing (Step S302) in the arrangementwiring tool is sent to the section for executing mask data processing.

Next, the shape checking processing is executed in the arrangementwiring tool, and thus a graphic having a portion having a long wiringlength is extracted and also the RC extracting processing is executed(Step S303). In the shape checking processing, information on a portionhaving a long wiring length equal to or longer than a preset length isextracted from the graphic data on the physical layout after completionof the detailed wiring. The information on the portion thus extracted isheld as the coordinates on the physical layout.

In addition, the arrangement wiring tool executes the OPC processing andthe OPC verifying processing based on the graphic data on the physicallayout, thereby extracting the lithography margin unachieved patterns.The conditions for the OPC processing and the OPC verifying processingand the contents of the lithography margin checking processing may beidentical to those in the first embodiment previously described. It isnoted that the portions of the lithography margin unachieved patternscan be obtained from the information on the connection in the circuit,and the result of calculation for the stepped portion simulation as wellas from the result of calculation for the transferred image. Inaddition, the portions of the lithography margin unachieved patterns mayalso be obtained from plural information, i.e., the result ofcalculation for the transferred image, the information on the connectionin the circuit, and the result of calculation for the stepped portionsimulation.

In the processing until now, the result of execution of the shapechecking processing is obtained, the portions each having wiring lengthnot meeting the specification about the characteristics, and thelithography margin unachieved patterns are executed, and the informationthereon is then held.

Next, the arrangement wiring tool calculates a capacitance value and aresistance value by using either the graphic data on the physical layoutpreviously generated, or the data on the transferred image calculated inthe OPC verifying processing. After that, a delay calculation processingportion built in the arrangement wiring system carries out delaycalculation by using both the capacitance value and resistance valuethus calculated.

As a result, when it is determined that it is necessary to carry out therepeater insertion because of occurrence of the timing error, therepeater insertion portions are extracted by referring to theinformation on the result of execution of the shape checking processing,the information on the lithography margin unachieved patterns, and theinformation on the connection in the circuit, and the repeater isinserted into each of the repeater insertion portions (Step S405). Inthe repeater insertion, the repeater is inserted between the wirings forwhich the element such as the buffer is divided into parts in the rangeof not violating a restriction of a floor plan about the arrangementwiring and the like.

The portion into which the repeater is to be inserted is the positionindicated by the arrow in FIG. 3 similarly to the case of the firstembodiment. In addition, the processing for carrying out layoutverification for the physical layout after completion of the repeaterinsertion (Step S306) and it is confirmed that no lithography marginunachieved portion newly occurs. Here, the layout verifying processing(Step S306) can be omitted if being unnecessary. The case where it isunnecessary to execute the layout verifying processing is the case whereit is possible to clearly determine that no lithography marginunachieved pattern newly occurs because of a slight change in layout.

Up to the processing described above is executed in the arrangementwiring tool. Subsequently, RC extracting processing (Step S307), delaycalculating processing (Step S308), and static timing analyzingprocessing (Step S309) are executed. Since the repeater insertion iscarried out in the processing executed in the arrangement wiring tool,no portion into which the repeater needs to be inserted occurs in andafter that processing.

Note that, in the third embodiment, a delay calculation processingportion built in the arrangement wiring tool executes the timing errorchecking processing (Step S304) based on the delay calculation. However,it takes a lot of time to carry out that delay calculation, which mayincrease the entire processing time. In such a case, a relationshipbetween each of the capacitance value and the resistance value, and thedelay time is previously obtained, and a restriction about thecapacitance value and the resistance value is produced. That is to say,when the arrangement wiring tool calculates the capacitance value andthe resistance value from the graphic data after completion of thedetailed wiring, either a design rule about the wiring width and thespace width, or a rule about the capacitance value and the resistancevalue is put as data into the arrangement wiring tool. Also, thearrangement wiring tool reads out the rule in calculating thecapacitance value and the resistance value, and outputs the data on thecoordinates of the schematic portion to an arrangement wiring database.When this process is adopted, the shape checking processing has only tobe executed, and thus it is unnecessary to execute the delay calculatingprocessing in Step S304.

In the third embodiment as described above, the operation forinputting/outputting the data is saved, thereby making it possible toreduce the processing time because a lot of main processing is executedin the arrangement wiring tool.

It is noted that in the third embodiment, the conditions for the OPCprocessing and OPC verifying processing described above can beindividually set depending on the semiconductor integrated circuit as anobject of the manufacture. In addition, the shape checking processingmay also depend on the analysis about the layout and the wafer image,the film thickness distribution or the like in addition to utilizationof the design rule checking system. In addition, an example, of thelayout of the repeater insertion, used in the first embodiment is merelyan example of a technical drawing of a circuit.

Moreover, although in the third embodiment, the repeater is selectivelyinserted into the portion having the long wiring length and thelithography margin unachieved pattern, the present invention is by nomeans limited to this condition. For example, as shown in FIG. 6, theinsertion condition may also be set depending on the purpose so that therepeater is selectively inserted into a portion meeting the condition inwhich at least two conditions of the three conditions of the lithographymargin unachieved pattern, the portion having the long wiring length,and the critical path overlap each other.

In addition, in the third embodiment, the example in which the portionhaving the long wiring length equal to or longer than the preset lengthis extracted from the graphic data on the physical layout of thesemiconductor integrated circuit has been described as the shapechecking processing. However, processing in which stepped portions ofthe wirings are detected from the cross sectional structure of thephysical layout, the stepped portion of the wiring having the size equalto or larger than a preset value is extracted from these steppedportions of the wirings, and the stepped portion of the wiring thusextracted is made a candidate of the repeater insertion position mayalso be adopted as shape checking processing other than the shapechecking processing described above.

APPLICATION EXAMPLES

The processing according to each of the first to third embodimentsdescribed above can be realized in the form of a program (a program formanufacturing a semiconductor device) which is executed in a computer.That is to say, the program is adapted to instruct the computer toexecute the steps of: (a) acquiring the information on the graphiccomposing the physical layout of the semiconductor integrated circuit;(b) carrying out calculation for the transferred image in the physicallayout, and calculating for the stepped portion in the wiring; (c)carrying out calculation for the signal delay based on the physicallayout, and obtaining the wiring not meeting the specification havingthe signal delay previously set therein; and (d) setting the positioninto which the repeater is to be inserted based on the results obtainedfrom the information on the graphic, the calculation for the transferredimage, and the calculation for the stepped portion, respectively, withrespect to the wiring not meeting the specification described above.

Of these steps (a) to (d), the step (a) corresponds to the schematicwiring (Steps S101, S201, and S301), and the detailed wiring (StepsS102, S202, and S302) which are shown in FIGS. 1, 4, and 5. The step (b)corresponds to the shape checking processing, the OPC processing, andthe OPC verifying processing (Steps S104, S203, and S303) which areshown in FIGS. 1, 4 and 5. The step (c) corresponds to the delaycalculating processing (Step S106, S204, and S304) which are shown inFIGS. 1, 4 and 5. Also, the step (d) corresponds to the repeaterinsertion made in consideration of the layout (Step S107, S205, andS305) which are shown in FIGS. 1, 4 and 5.

The steps composing the program for manufacturing a semiconductor devicein this application example may either be prepared in the form ofindividual modules, or have a constitution in which a plurality of stepsare incorporated in one module. For example, a design support program inthe manufacture of the semiconductor device has either a structure inwhich the various tools such as the arrangement wiring tool (arrangementwiring system), the RC extracting tool (RC extracting system), and thedelay calculating tool (delay calculating system) which are previouslydescribed are combined with one another, or a structure in whichcorresponding one(s) of the various tools is (are) read out as may benecessary. The module capable of utilizing these steps is stored in astorage section of a local computer, and is executed as may benecessary, or is stored in a server connected to a network, and isexecuted through an access to the server as may be necessary.

The processing containing therein these steps is executed in the form ofa program by the computer, thereby making it possible to carry out therepeater insertion for the lithography margin as the feature of each ofthe first to third embodiments.

It is noted that the program including the processing according to eachof the first to third embodiments is distributed in a state of beingstored in a predetermined medium (such as a CD or a DVD), or isdelivered through a network as well as is executed by the computer.

In addition, the present invention can also be realized in the form of acomputer system (a system for manufacturing a semiconductor device)having a configuration which is favorable to execution of the programcontaining therein the processing according to each of the first tothird embodiments described above. The system for manufacturing asemiconductor device according to another application example of thepresent invention includes hardware suitable for executing the varioussteps of the program according to each of the first to thirdembodiments. For example, the system for manufacturing a semiconductordevice according to the another application example of the presentinvention is configured to include a display device and an I/O interfacein addition to a CPU for speedily executing the various processing inthe steps, a memory having a capacity enough to execute the processing,and a storage section for storing therein the various data.

The program for manufacturing a semiconductor device according to theanother application example of the present invention is previouslyincorporated in the system for manufacturing a semiconductor device oris installed from the outside in the system for manufacturing asemiconductor device through a medium or a network, thereby making itpossible to execute the processing as the features of the first to thirdembodiments described above.

In particular, the system for manufacturing a semiconductor deviceaccording to the another application example is configured in the formof a design support system in which the various tools such as thearrangement wiring tool (arrangement wiring system), the RC extractingtool (RC extracting tool), and the delay calculating tool (delaycalculating system) are combined with one another as may be necessary.Thus, the system for manufacturing a semiconductor device has either aconfiguration in which these tools are individually incorporated so thatthe necessary tool(s) is (are) utilized case by case, or a configurationin which integrated software causing an access to the individual toolsto be readily made is incorporated so that the various tools are readout through an interface for the integrated software.

It should be understood by those skilled in the art that variousmodifications, combinations, sub-combinations and alterations may occurdepending on design requirements and other factors insofar as they arewithin the scope of the appended claims or the equivalents thereof.

1. A method of manufacturing a semiconductor device, comprising thesteps of: acquiring information on a graphic composing a physical layoutof a semiconductor integrated circuit; carrying out calculation for atransferred image in the physical layout; carrying out calculation for asignal delay based on the physical layout, and obtaining a wiring notmeeting a specification having the signal delay previously set therein;and setting a portion into which a repeater is to be inserted based on aresult of results obtained from the information on the graphic andcalculation for the transferred image, respectively, with respect to thewiring not meeting the specification.
 2. The method of manufacturing thesemiconductor device according to claim 1, wherein the portion intowhich the repeater is to be inserted is a portion not meeting alithography tolerance level which is previously set with respect to aresult of the results obtained from the information on the graphic andthe calculation for the transferred image, respectively.
 3. The methodof manufacturing the semiconductor device according to claim 1, whereinthe specification corresponds to a tolerance about one of a wiringwidth, a wiring length, and thicknesses of a metal and an interlayerinsulating film composing an element of the semiconductor integratedcircuit.
 4. The method of manufacturing the semiconductor deviceaccording to claim 1, wherein the information on the wiring not meetingthe specification is coordinate values on the physical layout.
 5. Amethod of manufacturing a semiconductor device, comprising the steps of:acquiring information on a graphic composing a physical layout of asemiconductor integrated circuit; carrying out calculation for atransferred image and calculation for a stepped portion in the physicallayout; carrying out calculation for a signal delay based on thephysical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein; and setting a portioninto which a repeater is to be inserted based on a result of resultsobtained from the information on the graphic, and the calculation forthe stepped portion, respectively, with respect to the wiring notmeeting the specification.
 6. The method of manufacturing asemiconductor device according to claim 5, wherein the portion intowhich the repeater is to be inserted is a portion not meeting alithography tolerance level which is previously set with respect to aresult of the results obtained from the information on the graphic, thecalculation for the transferred image, and the calculation for thestepped portion.
 7. The method of manufacturing the semiconductor deviceaccording to claim 5, wherein the specification corresponds to atolerance about one of a wiring width, a wiring length, and thicknessesof a metal and an interlayer insulating film composing an element of thesemiconductor integrated circuit.
 8. The method of manufacturing thesemiconductor device according to claim 5, wherein the information onthe wiring not meeting the specification is coordinate values on thephysical layout.
 9. A method of manufacturing a semiconductor device,comprising the steps of: acquiring information on a graphic composing aphysical layout of a semiconductor integrated circuit; carrying outcalculation for a transferred image in the physical layout; carrying outcalculation for a signal delay based on the physical layout, andobtaining a wiring not meeting a specification having the signal delaypreviously set therein; and sending the information on the wiring notmeeting the specification to a capacitance extracting system, andsetting a portion into which a repeater is to be inserted based on theinformation on the wiring not meeting the specification in thecapacitance extracting system.
 10. The method of manufacturing thesemiconductor device according to claim 9, wherein the portion intowhich the repeater is to be inserted is a portion not meeting alithography tolerance level which is previously set with respect to aone result of the results obtained from the information on the graphicand the calculation for the transferred image, respectively.
 11. Themethod of manufacturing the semiconductor device according to claim 9,wherein the specification corresponds to a tolerance about one of awiring width, a wiring length, and thicknesses of a metal and aninterlayer insulating film composing an element of the semiconductorintegrated circuit.
 12. The method of manufacturing the semiconductordevice according to claim 9, wherein the information on the wiring notmeeting the specification is coordinate values on the physical layout.13. A method of manufacturing a semiconductor device, comprising thesteps of: acquiring information on a graphic composing a physical layoutof a semiconductor integrated circuit; carrying out calculation for atransferred image and calculation for a stepped portion in the physicallayout; carrying out calculation for a signal delay based on thephysical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein; and sending theinformation on the wiring not meeting the specification to anarrangement wiring system, and setting a portion into which a repeateris to be inserted based on the information on the wiring not meeting thespecification in the arrangement wiring system.
 14. The method ofmanufacturing the semiconductor device according to claim 13, whereinthe portion into which the repeater is to be inserted is a portion notmeeting a lithography tolerance level which is previously set withrespect to a result of the results obtained from the information on thegraphic and the calculation for the transferred image, respectively. 15.The method of manufacturing a semiconductor device according to claim13, wherein the portion into which the repeater is to be inserted is aportion not meeting a lithography tolerance level which is previouslyset with respect to a result of the results obtained from theinformation on the graphic, the calculation for the transferred image,and the calculation for the stepped portion.
 16. The method ofmanufacturing the semiconductor device according to claim 13, whereinthe specification corresponds to a tolerance about one of a wiringwidth, a wiring length, and thicknesses of a metal and an interlayerinsulating film composing an element of the semiconductor integratedcircuit.
 17. The method of manufacturing the semiconductor deviceaccording to claim 13, wherein the information on the wiring not meetingthe specification is coordinate values on the physical layout.
 18. Aprogram for manufacturing a semiconductor device, the program beingadapted to instruct a computer to execute the steps of: acquiringinformation on a graphic composing a physical layout of a semiconductorintegrated circuit; carrying out calculation for a transferred image inthe physical layout; carrying out calculation for a signal delay basedon the physical layout, and obtaining a wiring not meeting aspecification having the signal delay previously set therein; andsetting a portion into which a repeater is to be inserted based on aresult of results obtained from the information on the graphic andcalculation for the transferred image, respectively, with respect to thewiring not meeting the specification.
 19. A program for manufacturing asemiconductor device, the program being adapted to instruct a computerto execute the steps of: acquiring information on a graphic composing aphysical layout of a semiconductor integrated circuit; carrying outcalculation for a transferred image in the physical layout; carrying outcalculation for a stepped portion in the physical layout; carrying outcalculation for a signal delay based on the physical layout, andobtaining a wiring not meeting a specification having the signal delaypreviously set therein; and setting a portion into which a repeater isto be inserted based on a result of results obtained from theinformation on the graphic, the calculation for the transferred image,and the calculation for the stepped portion, respectively.
 20. A programfor manufacturing a semiconductor device, the program being adapted toinstruct a computer to execute the steps of: acquiring information on agraphic composing a physical layout of a semiconductor integratedcircuit; carrying out calculation for a transferred image in thephysical layout; carrying out calculation for a signal delay based onthe physical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein; and sending theinformation on the wiring not meeting the specification to a capacitanceextracting system, and setting a portion into which a repeater is to beinserted based on a result of results obtained from the information onthe graphic, and the calculation for the transferred image,respectively.
 21. A program for manufacturing a semiconductor device,the program being adapted to instruct a computer to execute the stepsof: acquiring information on a graphic composing a physical layout of asemiconductor integrated circuit; carrying out one of calculation for atransferred image in the physical layout, and calculation for a steppedportion in the physical layout; carrying out calculation for a signaldelay based on the physical layout, and obtaining a wiring not meeting aspecification having the signal delay previously set therein; andsending the information on the wiring not meeting the specification toan arrangement wiring system, and setting a portion into which arepeater is to be inserted based on a result of results obtained fromthe information on the graphic, the calculation for the transferredimage, and the calculation for the stepped portion, respectively, withrespect to the wiring not meeting the specification in the arrangementwiring system.
 22. A system for manufacturing a semiconductor device,the system including a computer adapted to execute the steps of:acquiring information on a graphic composing a physical layout of asemiconductor integrated circuit; carrying out one of calculation for atransferred image, and calculation for a stepped portion in the physicallayout; carrying out calculation for a signal delay based on thephysical layout, and obtaining a wiring not meeting a specificationhaving the signal delay previously set therein; and setting a portioninto which a repeater is to be inserted based on a result of resultsobtained from the information on the graphic, and the calculation forthe transferred image, respectively, with respect to the wiring notmeeting the specification.
 23. A system for manufacturing asemiconductor device, the system including a computer adapted to executethe steps of: acquiring information on a graphic composing a physicallayout of a semiconductor integrated circuit; carrying out calculationfor a transferred image in the physical layout; carrying out calculationfor a stepped portion in the physical layout; carrying out calculationfor a signal delay based on the physical layout, and obtaining a wiringnot meeting a specification having the signal delay previously settherein; and setting a portion into which a repeater is to be insertedbased on a result of results obtained from the information on thegraphic, the calculation for the transferred image, and the calculationfor the stepped portion, respectively.
 24. A system for manufacturing asemiconductor device, the system including a computer adapted to executethe steps of: acquiring information on a graphic composing a physicallayout of a semiconductor integrated circuit; carrying out one ofcalculation for a transferred image in the physical layout, andcalculation for a stepped portion in the physical layout; carrying outcalculation for a signal delay based on the physical layout, andobtaining a wiring not meeting a specification having the signal delaypreviously set therein; and sending information on the wiring notmeeting the specification to a capacitance extracting system, andsetting a portion in which a repeater is to be inserted based on aresult of results obtained from the information on the graphic, and thecalculation for the transferred image, respectively, with respect to thewiring not meeting the specification in the capacitance extractingsystem.
 25. A system for manufacturing a semiconductor device, thesystem including a computer adapted to execute the steps of: acquiringinformation on a graphic composing a physical layout of a semiconductorintegrated circuit; carrying out calculation for a transferred image andcalculation for a stepped portion in the physical layout; carrying outcalculation for a signal delay based on the physical layout, andobtaining a wiring not meeting a specification having the signal delaypreviously set therein; and sending the information on the wiring notmeeting the specification to an arrangement wiring system, and setting aportion into which a repeater is to be inserted based on a result ofresults obtained from the information on the graphic, the calculationfor the transferred image, and the calculation for the stepped portion,respectively, with respect to the wiring not meeting the specificationin the arrangement wiring system.